Semiconductor package and method of manufacturing the same

ABSTRACT

A method of manufacturing a semiconductor package may include forming a first substrate including a redistribution layer, providing a second substrate including a semiconductor chip and an interconnection layer on the first substrate to connect the semiconductor chip to the redistribution layer, forming a first encapsulation layer covering the second substrate, and forming a via structure penetrating the first encapsulation layer. The forming the via structure may include forming a first via hole in the first encapsulation layer, forming a photosensitive material layer in the first via hole, exposing and developing the photosensitive material layer in the first via hole to form a second encapsulation layer having a second via hole, and filling the second via hole with a conductive material. A surface roughness of a sidewall of the first encapsulation layer may be greater than a surface roughness of a sidewall of the second encapsulation layer.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. non-provisional patent application is a divisional of U.S.application Ser. No. 16/983,298, filed Aug. 3, 2020, which claimspriority under 35 U.S.C. § 119 to Korean Patent Application No.10-2019-0176504, filed on Dec. 27, 2019, in the Korean IntellectualProperty Office, the disclosure of each of which is hereby incorporatedby reference in its entirety.

BACKGROUND

Embodiments of inventive concepts relate to a semiconductor package anda method of manufacturing the same, and more particularly, to asemiconductor package including a via structure with improved electricalcharacteristics and a method of manufacturing the same.

An integrated circuit chip may be realized in the form of asemiconductor package so as to be appropriately applied to an electronicproduct. In a typical semiconductor package, a semiconductor chip may bemounted on a printed circuit board (PCB) and may be electricallyconnected to the PCB through bonding wires or bumps. High-performance,high-speed and small electronic components have been increasinglydemanded with the development of an electronic industry. Thus, awafer-level package and a panel-level package are being studied.

SUMMARY

Embodiments of inventive concepts may provide a semiconductor packageincluding a via structure with improved electrical characteristics andreliability and a method of manufacturing the same.

In an embodiment, a method of manufacturing a semiconductor package mayinclude forming a first substrate including a redistribution layer,providing a second substrate including a semiconductor chip and aninterconnection layer on the first substrate, forming a firstencapsulation layer covering the second substrate, and forming a viastructure penetrating the first encapsulation layer. The forming the viastructure may include forming a first via hole in the firstencapsulation layer, forming a photosensitive material layer provided inthe first via hole and covering a top surface of the first encapsulationlayer, exposing and developing the photosensitive material layer in thefirst via hole to form a second encapsulation layer having a second viahole, and filling the second via hole with a conductive material. Asurface roughness of a sidewall of the first encapsulation layer may begreater than a surface roughness of a sidewall of the secondencapsulation layer. The semiconductor chip may be electricallyconnected to the redistribution layer.

In an embodiment, a method of manufacturing a semiconductor package mayinclude forming a first substrate including a redistribution layer,providing a second substrate including a semiconductor chip and aninterconnection layer on the first substrate, forming a firstencapsulation layer covering the second substrate, and forming a viastructure penetrating the first encapsulation layer. The semiconductorchip may be electrically connected to the redistribution layer. Theforming the via structure may include forming a first via hole in thefirst encapsulation layer, forming a photosensitive material layerprovided in the first via hole and covering a top surface of the firstencapsulation layer, exposing and developing the photosensitive materiallayer in the first via hole to form a second encapsulation layer havinga second via hole, and filling the second via hole with a conductivematerial. A sidewall of the via structure may have a first surface and asecond surface. The first surface of the sidewall of the via structuremay be inclined with respect to a top surface of the second substrate.The second surface of the sidewall of the via structure may be inclinedwith respect to each of the first surface of the sidewall of the viastructure and the top surface of the second substrate.

In an embodiment, a semiconductor package may include a lower insulatinglayer including an under-bump metal layer, a solder ball on a bottomsurface of the lower insulating layer and connected to the under-bumpmetal layer, a first substrate on a top surface of the lower insulatinglayer and the first substrate including a redistribution layer, a secondsubstrate including a semiconductor chip electrically connected to theredistribution layer and an interconnection layer, the second substratehaving a through-hole exposing the redistribution layer in a regionsurrounding the semiconductor chip, a first encapsulation layer coveringthe second substrate and having a first via hole, a second encapsulationlayer covering the first encapsulation layer and having a second viahole in the first via hole, a via structure filling the second via hole,and an upper insulating layer covering a portion of the via structureand a top surface of the second encapsulation layer. The firstencapsulation layer may fill the through-hole. A diameter of the secondvia hole may be less than a diameter of the first via hole. A sidewallof the via structure may have a first surface and a second surface. Thefirst surface of the sidewall of the via structure may be inclined withrespect to a top surface of the second substrate. The second surface ofthe sidewall of the via structure may be inclined with respect to eachof the first surface of the sidewall of the via structure and the topsurface of the second substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

Inventive concepts will become more apparent in view of the attacheddrawings and accompanying detailed description.

FIG. 1 is a cross-sectional view illustrating a semiconductor packageaccording to some embodiments of inventive concepts.

FIG. 2 is an enlarged view of a portion ‘A’ of FIG. 1 to illustrate avia structure of a semiconductor package according to some embodimentsof inventive concepts.

FIG. 3 is an enlarged view of a portion ‘B’ of FIG. 2 to illustrate aportion of a via structure of a semiconductor package according to someembodiments of inventive concepts.

FIGS. 4 to 10 are enlarged views corresponding to the portion ‘A’ ofFIG. 1 to illustrate a method of manufacturing a via structure of asemiconductor package according to some embodiments of inventiveconcepts.

FIG. 11 is an enlarged view of the portion ‘A’ of FIG. 1 to illustrate avia structure of a semiconductor package according to some embodimentsof inventive concepts.

FIG. 12 is a cross-sectional view illustrating a semiconductor packageaccording to some embodiments of inventive concepts.

DETAILED DESCRIPTION

As used herein, the singular forms “a,” “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. When the terms “about” or “substantially” are used in thisspecification in connection with a numerical value, it is intended thatthe associated numerical value includes a manufacturing or operationaltolerance (e.g., ±10%) around the stated numerical value. Moreover, whenthe words “generally” and “substantially” are used in connection withgeometric shapes, it is intended that precision of the geometric shapeis not required but that latitude for the shape is within the scope ofthe disclosure. Further, regardless of whether numerical values orshapes are modified as “about” or “substantially,” it will be understoodthat these values and shapes should be construed as including amanufacturing or operational tolerance (e.g., ±10%) around the statednumerical values or shapes.

Semiconductor packages and methods of manufacturing the same accordingto some embodiments of inventive concepts will be described more fullyhereinafter with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view illustrating a semiconductor packageaccording to some embodiments of inventive concepts.

Referring to FIG. 1 , a semiconductor package according to someembodiments of inventive concepts may include a lower insulating layer200, a first substrate 300, a second substrate 400, a molding layer 500,and an upper insulating layer 600. The second substrate 400 may includea semiconductor chip 100. The semiconductor package according to someembodiments of inventive concepts may be a fan-out wafer-level package(FOWLP) or a fan-out panel-level package (FOPLP). In some embodiments,the semiconductor package may be one of unit packages obtained bydividing a package structure including a plurality of the semiconductorchips 100 through a singulation process (e.g., a dicing process using adicing saw). In certain embodiments, the semiconductor package may havea structure in which fan-out packages are stacked, unlike FIG. 1 .

A solder ball 201 may be provided on a bottom surface of the lowerinsulating layer 200. The solder ball 201 may be provided in plurality,and the plurality of solder balls 201 may be arranged in a firstdirection D1. For example, the first direction D1 may be parallel to atop surface of the lower insulating layer 200. Hereinafter, a topsurface of a component may be defined as a surface facing a seconddirection D2, and a bottom surface of the component may be defined as asurface facing a direction opposite to the second direction D2. Forexample, the top surface of the lower insulating layer 200 may be asurface facing the semiconductor chip 100, and the bottom surface of thelower insulating layer 200 may be a surface opposite to the top surface.For example, the second direction D2 may be perpendicular to the topsurface of the lower insulating layer 200. In other words, the firstdirection D1 and the second direction D2 may be perpendicular to eachother. Each of the solder balls 201 may be electrically connected to anexternal terminal (e.g., a terminal of a main board of an electronicdevice). The lower insulating layer 200 may include an under-bump metallayer 203. The under-bump metal layer 203 may be surrounded by the lowerinsulating layer 200. A width of the under-bump metal layer 203 in thefirst direction D1 may decrease as a height or level in the seconddirection D2 increases. The under-bump metal layer 203 may beelectrically connected to the first substrate 300.

The first substrate 300 may include at least one or more redistributionlayers (RDL). For example, referring to FIG. 1 , the first substrate 300may include first to third redistribution layers 310, 330 and 350. Adesign of a connection position with the external terminal may be moreflexible with the first to third redistribution layers 310, 330 and 350.However, embodiments of inventive concepts are not limited thereto. Incertain embodiments, the semiconductor package may include a differentnumber of the redistribution layers.

The first redistribution layer 310 may be provided on the top surface ofthe lower insulating layer 200. In other words, the first redistributionlayer 310 may be disposed between the lower insulating layer 200 and thesecond redistribution layer 330. The first redistribution layer 310 mayinclude a first insulating layer 311, a first redistribution pattern313, and a first conductive via 315. For example, the firstredistribution pattern 313 may be located at a lower level than the topsurface of the lower insulating layer 200. The first redistributionpattern 313 may be electrically connected to the under-bump metal layer203. The first conductive via 315 may be provided on the firstredistribution pattern 313 and may be electrically connected to thefirst redistribution pattern 313. The first conductive via 315 may besurrounded by the first insulating layer 311.

The second redistribution layer 330 may be provided on a top surface ofthe first redistribution layer 310. In other words, the secondredistribution layer 330 may be disposed between the firstredistribution layer 310 and the third redistribution layer 350. Thesecond redistribution layer 330 may include a second insulating layer331, a second redistribution pattern 333, and a second conductive via335. For example, the second redistribution pattern 333 may be locatedat a lower level than the top surface of the first redistribution layer310. The second redistribution pattern 333 may be provided in plurality,and at least one of the plurality of second redistribution patterns 333may be electrically connected to the first conductive via 315. Thesecond conductive via 335 may be provided on the second redistributionpattern 333 and may be electrically connected to the secondredistribution pattern 333. The second conductive via 335 may besurrounded by the second insulating layer 331.

The third redistribution layer 350 may be provided on a top surface ofthe second redistribution layer 330. In other words, the thirdredistribution layer 350 may be disposed between the secondredistribution layer 330 and the second substrate 400. The thirdredistribution layer 350 may include a third insulating layer 351, athird redistribution pattern 353, and a third conductive via 355. Forexample, the third redistribution pattern 353 may be located at a lowerlevel than the top surface of the second redistribution layer 330. Thethird redistribution pattern 353 may be provided in plurality, and atleast one of the plurality of third redistribution patterns 353 may beelectrically connected to the second conductive via 335. The thirdconductive via 355 may be provided on the third redistribution pattern353 and may be electrically connected to the third redistributionpattern 353. The third conductive via 355 may be surrounded by the thirdinsulating layer 351. In addition, the third conductive via 355 may beprovided in plurality, some of the plurality of third conductive vias355 may be electrically connected to connection pads 110 of thesemiconductor chip 100, and others of the plurality of third conductivevias 355 may be electrically connected to the second substrate 400.

A width of each of the first to third conductive vias 315, 335 and 355in the first direction D1 may decrease as a height or level in thesecond direction D2 increases. Each of the first to third insulatinglayers 311, 331 and 351 may include an insulating material. For example,each of the first to third insulating layers 311, 331 and 351 mayinclude an inorganic material (e.g., silicon oxide, silicon nitride,and/or silicon oxynitride) and/or a poly amide-based polymer material.The first to third redistribution patterns 313, 333 and 353 and thefirst to third conductive vias 315, 335 and 355 may include a conductivematerial. The first to third redistribution patterns 313, 333 and 353and the first to third conductive vias 315, 335 and 355 may include, forexample, copper (Cu), a copper alloy, or aluminum (Al). Here, the copperalloy may mean an alloy obtained by mixing copper with a very smallamount of C, Ag, Co, Ta, In, Sn, Zn, Mn, Ti, Mg, Cr, Ge, Sr, Pt, Al, orZr.

In some embodiments, the first to third redistribution patterns 313, 333and 353 and the first to third conductive vias 315, 335 and 355 may beformed through a plurality of damascene processes or dual damasceneprocesses. Even though not shown in the drawings, barrier patterns maybe provided between the first to third redistribution patterns 313, 333and 353 and the first to third insulating layers 311, 331 and 351 andbetween the first to third conductive vias 315, 335 and 355 and thefirst to third insulating layers 311, 331 and 351, respectively. Forexample, the barrier patterns may include at least one of Ta, TaN,TaSiN, Ti, TiN, TiSiN, W, or WN.

The second substrate 400 may include the semiconductor chip 100 andfirst and second burying layers 410 and 430. However, embodiments ofinventive concepts are not limited thereto. In certain embodiments, thesemiconductor package may include a different number of the buryinglayers. The second substrate 400 may be, for example, an embedded tracesubstrate (ETS).

For example, the semiconductor chip 100 may be a logic chip, a memorychip, or an application processor chip. The semiconductor chip 100 maybe disposed in a through-hole TH penetrating the first and secondburying layers 410 and 430 and may be surrounded by the first and secondburying layers 410 and 430, when viewed in a plan view. Thesemiconductor chip 100 may be spaced apart from the first and secondburying layers 410 and 430 with a portion of the through-hole THinterposed therebetween, when viewed in a cross-sectional view. Thesemiconductor chip 100 may have a bottom surface 100 b adjacent to thefirst substrate 300, and a top surface 100 t opposite to the bottomsurface 100 b. For example, the bottom surface 100 b of thesemiconductor chip 100 may be an active surface, and the top surface 100t of the semiconductor chip 100 may be a non-active surface. Theconnection pad 110 may be provided on the bottom surface 100 b of thesemiconductor chip 100. The connection pad 110 may be provided inplurality, and the plurality of connection pads 110 may be arranged inthe first direction D1. The number, a pitch and/or arrangement of theconnection pads 110 may be changed depending on the numbers, pitchesand/or arrangement of the first to third redistribution patterns 313,333 and 353 and the number, a pitch and/or arrangement of the solderballs 201. For example, the connection pads 110 may be arranged moredensely than the solder balls 201. The semiconductor chip 100 may beelectrically connected to the solder balls 201 through the connectionpads 110 and the first to third redistribution patterns 313, 333 and 353and the first to third conductive vias 315, 335 and 355 of the firstsubstrate 300. In addition, the semiconductor package according to someembodiments of inventive concepts may further include a passivationlayer (not shown) covering the bottom surface 100 b of the semiconductorchip 100 and a portion of a bottom surface of the connection pad 110. Incertain embodiments, an interposer and an underfill material may bedisposed between the semiconductor chip 100 and the connection pad 110,unlike FIG. 1 .

The first burying layer 410 may be provided on a portion of a topsurface of the third redistribution layer 350. In other words, the firstburying layer 410 may be disposed between the first substrate 300 andthe second burying layer 430. The first burying layer 410 may include afirst burying insulating layer 411, a first conductive pattern 413, afirst buried via 415, and a second conductive pattern 417. In someembodiments, the first and second conductive patterns 413 and 417 maycorrespond to interconnection layers. The first conductive pattern 413may be provided on the top surface of the third redistribution layer 350and may be electrically connected to the third conductive via 355. Thefirst buried via 415 may be provided on the first conductive pattern413. The first buried via 415 may be surrounded by the first buryinginsulating layer 411. For example, the second conductive pattern 417 maybe located at a higher level than a top surface of the first buryinginsulating layer 411. The first conductive pattern 413, the first buriedvia 415 and the second conductive pattern 417 may be electricallyconnected to each other.

The second burying layer 430 may be provided on a top surface of thefirst burying layer 410. In other words, the second burying layer 430may be disposed between the first burying layer 410 and the moldinglayer 500. The second burying layer 430 may include a second buryinginsulating layer 431, a second buried via 433, and a third conductivepattern 435. In some embodiments, the third conductive pattern 435 maycorrespond to an interconnection layer. The second buried via 433 may beprovided on the second conductive pattern 417. The second buried via 433may be surrounded by the second burying insulating layer 431. Forexample, the third conductive pattern 435 may be located at a higherlevel than a top surface of the second burying insulating layer 431. Thesecond buried via 433 and the third conductive pattern 435 may beelectrically connected to each other and may be electrically connectedto the first conductive pattern 413, the first buried via 415, and thesecond conductive pattern 417.

A width of each of the first and second buried vias 415 and 433 in thefirst direction D1 may increase as a height or level in the seconddirection D2 increases. The first and second burying insulating layers411 and 431 may include an insulating material. In some embodiments, thefirst and second burying insulating layers 411 and 431 may includesubstantially the same material as the first to third insulating layers311, 331 and 351 of the first substrate 300. In certain embodiments, thefirst and second burying insulating layers 411 and 431 may include adifferent insulating material from those of the first to thirdinsulating layers 311, 331 and 351 of the first substrate 300. Forexample, the first and second burying insulating layers 411 and 431 mayinclude a thermosetting resin (e.g., an epoxy resin), a thermoplasticresin (e.g., polyimide), or an insulating material in which the resin isimpregnated into a core material (e.g., an inorganic filler and/or aglass fiber (or glass cloth or glass fabric)), e.g., prepreg, anAjinomoto build-up film (ABF), FR-4, or bismaleimide triazine (BT). Thefirst conductive pattern 413, the first buried via 415, the secondconductive pattern 417, the second buried via 433 and the thirdconductive pattern 435 may include a conductive material. For example,the first conductive pattern 413, the first buried via 415, the secondconductive pattern 417, the second buried via 433 and the thirdconductive pattern 435 may include copper (Cu), a copper alloy, oraluminum (Al).

The molding layer 500 may cover the semiconductor chip 100 and thesecond substrate 400. In addition, the molding layer 500 may fill thethrough-hole TH around the semiconductor chip 100. The molding layer 500may include a first portion 510 covering the top surface 100 t of thesemiconductor chip 100 and atop surface of the second burying layer 430and extending in the first direction D1, and a second portion 530filling the through-hole TH and extending in the second direction D2. Inother words, the semiconductor chip 100 may be spaced apart from thefirst and second burying layers 410 and 430 with the second portion 530of the molding layer 500 interposed therebetween. For example, themolding layer 500 may include an insulating polymer (e.g., anepoxy-based polymer) or an Ajinomoto build-up film (ABF).

A via structure VS penetrating the molding layer 500 may be provided.The via structure VS may include an upper conductive via 501 and anupper conductive pad 503. A width of the upper conductive via 501 in thefirst direction D1 may increase as a height or level in the seconddirection D2 increases. In other words, a sidewall VSs of the viastructure VS may have a gradient with respect to the top surface of thefirst substrate 300 and the top surface of the second substrate 400. Theupper conductive pad 503 may be provided in plurality, and one or someof the plurality of upper conductive pads 503 may not be connected tothe upper conductive via 501. The via structure VS and a method ofmanufacturing the same will be described in more detail with referenceto FIGS. 2 to 11 .

The upper insulating layer 600 may cover the molding layer 500 and aportion of the upper conductive pad 503 of the via structure VS. Theupper insulating layer 600 may have an opening 601 exposing anotherportion of the upper conductive pad 503. A width of the opening 601 inthe first direction D1 may increase as a height or level in the seconddirection D2 increases.

A method of manufacturing a semiconductor package according to someembodiments of inventive concepts may include forming a first substrate300 including first to third redistribution layers 310, 330 and 350,providing a second substrate 400 including a semiconductor chip 100 andfirst to third conductive patterns 413, 417 and 435 on the firstsubstrate 300 to electrically connect the semiconductor chip 100 to thefirst to third redistribution layers 310, 330 and 350 of the firstsubstrate 300, forming a molding layer 500 covering the second substrate400, and forming a via structure VS penetrating the molding layer 500.

The first substrate 300 including the first to third redistributionlayers 310, 330 and 350, the lower insulating layer 200 including theunder-bump metal layer 203, and the solder balls 201 may be formed on acarrier substrate. Thereafter, the carrier substrate may be removed, andthe second substrate 400 including the semiconductor chip 100 may beformed on the top surface of the first substrate 300. In other words,the top surface of the first substrate 300 may be in contact with thebottom surface 100 b of the semiconductor chip 100.

A process of forming the through-hole TH penetrating the secondsubstrate 400 may be performed between the process of forming the secondsubstrate 400 and the process of forming the molding layer 500. Moreparticularly, the through-hole TH may penetrate the first and secondburying layers 410 and 430 adjacent to the semiconductor chip 100. Thethrough-hole TH may be formed to surround the semiconductor chip 100.Thereafter, the molding layer 500 may be formed to fill the through-holeTH.

The formation of the via structure VS penetrating the molding layer 500will be described later in detail with reference to FIGS. 4 to 10 .

FIG. 2 is an enlarged view of a portion ‘A’ of FIG. 1 to illustrate avia structure of a semiconductor package according to some embodimentsof inventive concepts.

Referring to FIG. 2 , the molding layer 500 and the via structure VS areillustrated. The molding layer 500 may include a first encapsulationlayer ENC1 and a second encapsulation layer ENC2. The via structure VSmay include the upper conductive via 501, the upper conductive pad 503,and a seed layer SD.

The first encapsulation layer ENC1 may cover the top surface of thesecond burying insulating layer 431 and at least a portion of a topsurface 435 t of the third conductive pattern 435. The top surface 435 tof the third conductive pattern 435 may be substantially flat. Inaddition, the top surface 435 t of the third conductive pattern 435 maybe substantially parallel to the top surface of the second buryinginsulating layer 431. A space surrounded by a sidewall ENC1 s of thefirst encapsulation layer ENC1 may be defined as a first via hole VH1.The sidewall ENC1 s of the first encapsulation layer ENC1 may have agradient with respect to the top surface 435 t of the third conductivepattern 435. In other words, a width of the first via hole VH1 in thefirst direction D1 may increase as a height or level in the seconddirection D2 increases. The first encapsulation layer ENC1 may be anadhesive insulating film. For example, the first encapsulation layerENC1 may include an insulating resin RS and a plurality of fillers FL inthe insulating resin RS. The insulating resin RS may include, forexample, a polymer material such as epoxy or polyimide. The fillers FLmay include, for example, an inorganic material such as silica. Thefillers FL may be atypical and may be randomly dispersed in theinsulating resin RS. However, embodiments of inventive concepts are notlimited thereto. In certain embodiments, the first encapsulation layerENC1 may not include the fillers FL but may include only the insulatingresin RS.

The second encapsulation layer ENC2 may cover the sidewall ENC1 s and atop surface of the first encapsulation layer ENC1. A space surrounded bya sidewall ENC2 s of the second encapsulation layer ENC2 may be definedas a second via hole VH2. Here, the sidewall ENC2 s of the secondencapsulation layer ENC2 may be a surface which is not in contact withthe first encapsulation layer ENC1. At the same level, a diameter of thesecond via hole VH2 may be less than a diameter of the first via holeVH1. The sidewall ENC2 s of the second encapsulation layer ENC2 may bein contact with the sidewall VSs of the via structure VS. In otherwords, a profile of the sidewall ENC2 s of the second encapsulationlayer ENC2 may be substantially the same as a profile of the sidewallVSs of the via structure VS. A width W1 (W2) of the second encapsulationlayer ENC2 in the first direction D1 may be constant in the first viahole VH1. The width W1 (W2) of the second encapsulation layer ENC2 inthe first direction D1 may range from about 5 μm to about 20 μm. In FIG.2 , the width W1, in the first direction D1, of the second encapsulationlayer ENC2 provided at a left side of the via structure VS may besubstantially equal to the width W2, in the first direction D1, of thesecond encapsulation layer ENC2 provided at a right side of the viastructure VS. However, the second encapsulation layers ENC2 respectivelyprovided at the left and right sides of the via structure VS may beconnected to each other to surround the via structure VS, when viewed ina plan view. In addition, under a level of the top surface of the firstencapsulation layer ENC1, the width W1 or W2 of the second encapsulationlayer ENC2 in the first direction D1 may be constant as a level in thesecond direction D2 increases. The second encapsulation layer ENC2 mayinclude, for example, a photo-imageable dielectric resin. For example,the second encapsulation layer ENC2 may include at least one ofphotosensitive polyimide (PSPI), polybenzoxazole (PBO), a phenolicpolymer, or a benzocyclobutene-based polymer (BCB).

The seed layer SD may conformally cover the top surface 435 t of thethird conductive pattern 435 exposed by the second via hole VH2, thesidewall ENC2 s of the second encapsulation layer ENC2 exposed by thesecond via hole VH2, and a portion of the top surface of the secondencapsulation layer ENC2. The seed layer SD may be spaced apart from thefirst encapsulation layer ENC1 with the second encapsulation layer ENC2interposed therebetween. A space surrounded by a sidewall of the seedlayer SD may be defined as a third via hole VH3. Here, the sidewall ofthe seed layer SD may be a surface which is not in contact with thesecond encapsulation layer ENC2. A bottom surface of the third via holeVH3 may be spaced apart from the top surface 435 t of the thirdconductive pattern 435 in the second direction D2. At the same level, adiameter of the third via hole VH3 may be less than the diameter of thesecond via hole VH2. The seed layer SD may be disposed between the upperconductive via 501 and the second encapsulation layer ENC2 and betweenthe upper conductive pad 503 and the second encapsulation layer ENC2.The seed layer SD may assist the formation of the upper conductive via501 and the upper conductive pad 503. For example, the seed layer SD mayincrease uniformity of plating and may function as initial nucleationsites. For example, the seed layer SD may include at least one of copper(Cu), nickel (Ni), silver (Ag), gold (Au), aluminum (Al), tungsten (W),platinum (Pt), palladium (Pd), or any alloy thereof. In particular, theseed layer SD may include platinum (Pt).

The upper conductive via 501 and the upper conductive pad 503 may beprovided on the seed layer SD. The upper conductive via 501 may fill thethird via hole VH3. A width of the upper conductive via 501 in the firstdirection D1 may increase as a height or level in the second directionD2 increases. The upper conductive pad 503 may be provided on the upperconductive via 501 and the seed layer SD and may extend in the firstdirection D1. In addition, a portion of the top surface of the upperconductive pad 503 may be exposed by the opening 601 of the upperinsulating layer 600. The upper conductive via 501 and the upperconductive pad 503 may include, for example, copper (Cu), a copperalloy, or aluminum (Al).

A profile of the sidewall VSs of the via structure VS will be describedhereinafter in detail. The sidewall VSs of the via structure VS may havea first surface S1, a second surface S2, and a third surface S3. Moreparticularly, the first surface S1 may be inclined with respect to thetop surface 435 t of the third conductive pattern 435. The secondsurface S2 may be inclined with respect to each of the first surface S1and the top surface 435 t of the third conductive pattern 435. An acuteangle between the second surface S2 and the top surface 435 t of thethird conductive pattern 435 may be greater than 0 degree. An acuteangle between the first surface S1 and the top surface 435 t of thethird conductive pattern 435 may be greater than the acute angle betweenthe second surface S2 and the top surface 435 t of the third conductivepattern 435. The third surface S3 may be substantially parallel to thetop surface 435 t of the third conductive pattern 435 and the firstdirection D1 in which the upper conductive pad 503 extends.

The sidewall VSs of the via structure VS may be spaced apart from thefirst encapsulation layer ENC1 with the second encapsulation layer ENC2interposed therebetween. In the first via hole VH1, a distance betweenthe first surface S1 and the first encapsulation layer ENC1 in the firstdirection D1 may be equal to the width W1 or W2 of the secondencapsulation layer ENC2 in the first direction D1. In other words, thedistance between the first surface S1 and the first encapsulation layerENC1 in the first direction D1 may be constant in the first via holeVH1. In addition, a distance between the third surface S3 and the firstencapsulation layer ENC1 in the second direction D2 may be constant.However, a distance between the second surface S2 and the firstencapsulation layer ENC1 may not be constant. For example, a corner ofthe first encapsulation layer ENC1 may be the closest to the secondsurface S2.

According to the embodiments of inventive concepts, the via structure VSmay have the first surface S1 and the second surface S2 which havedifferent gradients with respect to the top surface 435 t of the thirdconductive pattern 435, and thus a cross-sectional area of the viastructure VS may be increased. As a result, an electrical resistance ofthe via structure VS may be reduced. In addition, stress may bedispersed at a contact portion of the upper conductive via 501 and theupper conductive pad 503 of the via structure VS, and thus it ispossible to prevent a crack from occurring at the contact portion. Inother words, electrical characteristics and reliability of thesemiconductor package may be improved by the via structure VS accordingto the embodiments of inventive concepts.

The via structure VS according to the embodiments of inventive conceptsmay be applied to various semiconductor packages having differentstructures from the structure illustrated in FIGS. 1 and 2 . Inparticular, the via structure VS according to the embodiments ofinventive concepts may be variously applied to semiconductor packagesusing an Ajinomoto build-up film (ABF) as a molding member.

FIG. 3 is an enlarged view of a portion ‘B’ of FIG. 2 to illustrate aportion of a via structure of a semiconductor package according to someembodiments of inventive concepts.

Referring to FIG. 3 , the sidewall ENC1 s of the first encapsulationlayer ENC1 may be compared with the sidewall ENC2 s of the secondencapsulation layer ENC2. The sidewall ENC1 s of the first encapsulationlayer ENC1 and the sidewall ENC2 s of the second encapsulation layerENC2 may include concave portions DTT and concave portions DT2,respectively. An average depth of the concave portions DTT of thesidewall ENC1 s of the first encapsulation layer ENC1 may be greaterthan an average depth of the concave portions DT2 of the sidewall ENC2 sof the second encapsulation layer ENC2. In addition, at least one of thefillers FL of the first encapsulation layer ENC1 may include aprotrusion FLp protruding from the sidewall ENC1 s of the firstencapsulation layer ENC1. Thus, a surface roughness of the sidewall ENC1s of the first encapsulation layer ENC1 may be greater than a surfaceroughness of the sidewall ENC2 s of the second encapsulation layer ENC2.

FIGS. 4 to 10 are enlarged views corresponding to the portion ‘A’ ofFIG. 1 to illustrate a method of manufacturing a via structure of asemiconductor package according to some embodiments of inventiveconcepts.

Referring to FIG. 4 , a first dielectric layer DL1 may be formed on thetop surface of the second burying insulating layer 431 and the topsurface 435 t of the third conductive pattern 435. The first dielectriclayer DL1 may completely cover the top surface 435 t of the thirdconductive pattern 435. For example, the first dielectric layer DL1 mayinclude an insulating resin RS and a plurality of fillers FL in theinsulating resin RS.

Referring to FIGS. 4 and 5 , the first dielectric layer DL1 may beprocessed to form a first encapsulation layer ENC1 having a first viahole VH1. The processing of the first dielectric layer DL1 may beperformed by a laser process. More particularly, the processing of thefirst dielectric layer DL1 may be performed by an etching process suchas a drilling process, a laser ablation process, or a laser cuttingprocess. At this time, predetermined alignment algorithm may be used todetermine a laser processing position (i.e., a formation position of thefirst via hole VH1) on the first dielectric layer DL1.

The first via hole VH1 may be defined by a portion of the top surface435 t of the third conductive pattern 435 and a sidewall ENC1 s of thefirst encapsulation layer ENC1. The portion of the top surface 435 t ofthe third conductive pattern 435 may be exposed by the first via holeVH1. The sidewall ENC1 s of the first encapsulation layer ENC1 may havea gradient with respect to the top surface 435 t of the third conductivepattern 435. In other words, a width of the first via hole VH1 in thefirst direction D1 may increase as a height or level in the seconddirection D2 increases. The gradient of the sidewall ENC1 s of the firstencapsulation layer ENC1 may be substantially constant. In other words,the first encapsulation layer ENC1 may have a single corner at an upperportion of the first via hole VH1.

After the formation of the first encapsulation layer ENC1, a desmearprocess may further be performed on the portion of the top surface 435 tof the third conductive pattern 435 and the sidewall ENC1 s of the firstencapsulation layer ENC1. Residues of the first dielectric layer DL1,which remain on the top surface 435 t of the third conductive pattern435, may be removed through the desmear process. In addition, portionsof the fillers FL, which protrude from the sidewall ENC1 s of the firstencapsulation layer ENC1, may be removed through the desmear process.However, after the desmear process, some of the fillers FL of the firstencapsulation layer ENC1 may include protrusions FLp protruding from thesidewall ENC1 s of the first encapsulation layer ENC1. The surfaceroughness of the sidewall ENC1 s of the first encapsulation layer ENC1like FIG. 3 may be formed through the desmear process.

Referring to FIG. 6 , a second dielectric layer DL2 may be formed on thethird conductive pattern 435 and the first encapsulation layer ENC1. Thesecond dielectric layer DL2 may include a photosensitive material. Inother words, the second dielectric layer DL2 may be a photosensitivematerial layer. The second dielectric layer DL2 may fill the first viahole VH1. A top surface DL2 t of the second dielectric layer DL2 may beconcave in a partial region. The concave region of the top surface DL2 tof the second dielectric layer DL2 may overlap with the first via holeVH1 in the second direction D2. The second dielectric layer DL2 may beformed by a coating process.

Thereafter, an exposure process may be performed on a partial region ofthe second dielectric layer DL2. An exposure region PLR of the seconddielectric layer DL2 may be a specific region in the first via hole VH1.In other words, laser light DIL may be incident on the specific regionin the first via hole VH1. A side surface PLRs of the exposure regionPLR may be spaced apart from the sidewall ENC1 s of the firstencapsulation layer ENC1. The side surface PLRs of the exposure regionPLR may have a gradient with respect to the top surface 435 t of thethird conductive pattern 435. The gradient of the side surface PLRs ofthe exposure region PLR may be substantially the same as the gradient ofthe sidewall ENC1 s of the first encapsulation layer ENC1.

The exposure process may be performed by, for example, a laser directimaging (LDI) exposure apparatus or an ultraviolet direct imaging (UVDI)exposure apparatus. The exposure process by the LDI exposure apparatusor the UVDI exposure apparatus may be performed without a photomask. Forexample, the LDI exposure apparatus or the UVDI exposure apparatus maydetermine a position of the exposure region on the basis ofpredetermined coordinates without a photomask. At this time, alignmentalgorithm which is substantially the same as the alignment algorithmused to form the first via hole VH1 in FIG. 5 may be used to determinethe position of the exposure region. The exposure process using the LDIexposure apparatus or the UVDI exposure apparatus may have high speed,high accuracy and excellent alignment characteristics as compared with ageneral exposure process using a photomask. An edge of a wafer may becontracted or expanded in a heat treatment process performed on thewafer (or a panel) including a semiconductor package. However, the LDIexposure apparatus or the UVDI exposure apparatus may determine theposition of the exposure region matched with the contracted or expandedwafer, and thus the alignment characteristic thereof may be excellent.In addition, the exposure process using the LDI exposure apparatus orthe UVDI exposure apparatus may use the same alignment algorithm as thelaser process of forming the first via hole VH1, and thus the alignmentcharacteristic may be more improved.

The LDI exposure apparatus may use a single-wavelength laser. Forexample, a wavelength of the laser light DIL used in the LDI exposureapparatus may be selected from a range of 380 nm to 420 nm. Meanwhile,the laser light DIL used in the UVDI exposure apparatus may have awavelength band. For example, the UVDI exposure apparatus may use thelaser light DIL having a wavelength band of 300 nm to 500 nm. Inaddition, for example, the laser light DIL used in the UVDI exposureapparatus may have a peak at a specific wavelength in the wavelengthband. Referring again to FIG. 2 , a profile of a sidewall VSs of a viastructure VS to be formed later may be controlled depending on awavelength and an intensity of the laser light DIL used in the exposureprocess. Hereinafter, FIGS. 6 to 10 illustrate a case in which theexposure process is performed by the LDI exposure apparatus, and FIG. 11illustrates a case in which the exposure process is performed by theUVDI exposure apparatus.

Referring to FIGS. 6 and 7 , the second dielectric layer DL2 exposed bythe exposure process may be developed to form a second encapsulationlayer ENC2 having a second via hole VH2. A sidewall ENC2 s of the secondencapsulation layer ENC2 may be substantially the same as the sidesurface PLRs of the exposure region illustrated in FIG. 6 . The secondvia hole VH2 may be defined by a portion of the top surface 435 t of thethird conductive pattern 435 and the sidewall ENC2 s of the secondencapsulation layer ENC2. The portion of the top surface 435 t of thethird conductive pattern 435 may be exposed by the second via hole VH2.The sidewall ENC2 s of the second encapsulation layer ENC2 may have agradient with respect to the top surface 435 t of the third conductivepattern 435. In other words, a width of the second via hole VH2 in thefirst direction D1 may increase as a height or level in the seconddirection D2 increases. A central axis of the second via hole VH2 may besubstantially the same as a central axis of the first via hole VH1.Thus, a width W1 (W2) of the second encapsulation layer ENC2 in thefirst direction D1 may be substantially constant in the first via holeVH1. The width W1 (W2) of the second encapsulation layer ENC2 in thefirst direction D1 may be minimized by the exposure process using theLDI exposure apparatus or the UVDI exposure apparatus. Thus, a degree offreedom of a position design of the via structure VS (see FIG. 2 ) to beformed later may be increased, and it is possible to prevent a crackfrom occurring at the sidewall ENC2 s of the second encapsulation layerENC2.

The sidewall ENC2 s of the second encapsulation layer ENC2 may havesurfaces having different gradients with respect to the top surface 435t of the third conductive pattern 435. In more detail, a first surfaceS1 may be inclined with respect to the top surface 435 t of the thirdconductive pattern 435, and a second surface S2 may be inclined withrespect to each of the first surface S1 and the top surface 435 t of thethird conductive pattern 435. An acute angle between the second surfaceS2 and the top surface 435 t of the third conductive pattern 435 may begreater than 0 degree. An acute angle between the first surface S1 andthe top surface 435 t of the third conductive pattern 435 may be greaterthan the acute angle between the second surface S2 and the top surface435 t of the third conductive pattern 435. In other words, the secondencapsulation layer ENC2 may have two corners in the second via holeVH2. The gradient of the second surface S2 may be due to the concaveportion of the top surface DL2 t of the second dielectric layer DL2 inFIG. 6 . In addition, a top surface of the second encapsulation layerENC2 may be defined as a third surface S3. The third surface S3 may besubstantially parallel to the first direction D1 in which the topsurface 435 t of the third conductive pattern 435 extends.

After the formation of the second encapsulation layer ENC2, a plasmatreatment process may further be performed on the portion of the topsurface 435 t of the third conductive pattern 435. Residues of thesecond dielectric layer DL2, which remain on the top surface 435 t ofthe third conductive pattern 435, may be removed through the plasmatreatment process.

Referring to FIG. 8 , a seed metal layer PSD may be formed toconformally cover the top surface 435 t of the third conductive pattern435 and the sidewall ENC2 s and the top surface of the secondencapsulation layer ENC2. A space surrounded by the seed metal layer PSDmay be defined as a third via hole VH3. A thickness of the seed metallayer PSD may be substantially constant. Thus, a profile of a sidewallof the seed metal layer PSD may be substantially the same as a profileof the sidewall ENC2 s of the second encapsulation layer ENC2. The seedmetal layer PSD may be formed by, for example, a sputtering process.Since the seed metal layer PSD is formed by the sputtering process, thethin seed metal layer PSD may be easily formed to easily realize a finepattern. In addition, the sputtering process may not use a harmfulmaterial and thus may be environmentally friendly.

Referring to FIG. 9 , a photoresist pattern PR may be formed on the seedmetal layer PSD outside the third via hole VH3. An open hole OP may besurrounded by the photoresist pattern PR. A conductive material CM mayfill the third via hole VH3 through the open hole OP and then may fillat least a portion of the open hole OP. The photoresist pattern PR maybe formed by a photolithography process. The conductive material CM maybe formed on the seed metal layer PSD by a plating process. For example,the plating process may be performed by an electroplating method or anelectroless plating method. The seed metal layer PSD and the conductivematerial CM may completely fill the second via hole VH2. The seed metallayer PSD may assist growth of the conductive material CM. A top surfaceof the conductive material CM may be located at a higher level than thetopmost surface of the seed metal layer PSD. In addition, the topsurface of the conductive material CM may be located at a lower levelthan a top surface of the photoresist pattern PR. The photoresistpattern PR may be removed after the formation of the conductive materialCM.

Referring to FIGS. 9 and 10 , an upper portion of the conductivematerial CM and a portion of the seed metal layer PSD may be etched toform a via structure VS. The via structure VS may include a seed layerSD, an upper conductive via 501, and an upper conductive pad 503. In thevia structure VS, the upper conductive pad 503 may completely overlapwith the seed layer SD in the second direction D2. A profile of asidewall VSs of the via structure VS may be substantially the same as aprofile of the seed layer SD and a profile of the sidewall ENC2 s of thesecond encapsulation layer ENC2. In more detail, the sidewall VSs of thevia structure VS may have first and second surfaces S1 and S2 havingdifferent gradients with respect to the top surface 435 t of the thirdconductive pattern 435, and a third surface S3 on the top surface of thesecond encapsulation layer ENC2.

Referring again to FIG. 2 , an upper insulating layer 600 may be formedon the second encapsulation layer ENC2 and the via structure VS. Aportion of the upper insulating layer 600 may be patterned to form anopening 601 exposing a portion of the upper conductive pad 503. A width,in the first direction D1, of the opening 601 of the upper insulatinglayer 600 may increase as a height or level in the second direction D2increases.

FIG. 11 is an enlarged view of the portion ‘A’ of FIG. 1 to illustrate avia structure of a semiconductor package according to some embodimentsof inventive concepts. Hereinafter, the descriptions to substantiallythe same features and components as mentioned above with reference toFIGS. 1 to 10 will be omitted for the purpose of ease and convenience inexplanation.

Referring to FIG. 11 , a sidewall VSs of the via structure VS may have afirst surface S1, a second surface S2 c, and a third surface S3. Moreparticularly, the first surface S1 may be inclined with respect to thetop surface 435 t of the third conductive pattern 435. Here, a gradientof the first surface S1 may be substantially constant. The third surfaceS3 may be substantially parallel to the top surface 435 t of the thirdconductive pattern 435 and the first direction D1 in which the upperconductive pad 503 extends.

The second surface S2 c may be a curved surface connected to the firstsurface S1 and the third surface S3. The second surface S2 c may have acurved profile in a cross-sectional view of FIG. 11 . A curvature of thesecond surface S2 c may be less than a curvature of the corner of thefirst encapsulation layer ENC1. When the exposure process is performedby the UVDI exposure apparatus having the wavelength band in FIG. 6 ,the second surface S2 c having the curved profile may be formed. Inother words, at least a portion of the sidewall ENC2 s of the secondencapsulation layer ENC2 may be formed in a curved surface by the laserlight having a wide wavelength band, and thus a portion of the sidewallVSs of the via structure VS may be formed in a curved surface.

FIG. 12 is a cross-sectional view illustrating a semiconductor packageaccording to some embodiments of inventive concepts. Hereinafter, thedescriptions to substantially the same features and components asmentioned above with reference to FIGS. 1 to 11 will be omitted for thepurpose of ease and convenience in explanation.

Referring to FIG. 12 , a semiconductor package according to someembodiments of inventive concepts may have a package-on-package (PoP)structure. In other words, a second semiconductor package 20 may beprovided on a first semiconductor package 10. The first semiconductorpackage 10 may be the same as the semiconductor package described withreference to FIG. 1 .

The second semiconductor package 20 may include an upper substrate 700,a first upper semiconductor chip 810, a second upper semiconductor chip830, and an upper molding layer 850 covering the first and second uppersemiconductor chips 810 and 830. For example, the upper molding layer850 may include substantially the same insulating material as themolding layer 500 of the first semiconductor package 10.

The upper substrate 700 may be spaced apart from the upper insulatinglayer 600 of the first semiconductor package 10 in the second directionD2. A fourth conductive pattern 730 and a fifth conductive pattern 750may be provided on the upper substrate 700. The fourth conductivepattern 730 may be provided on a bottom surface of the upper substrate700 and may be electrically connected to the upper conductive pad 503 ofthe first semiconductor package 10 through a package connection member710 including a conductive material. The package connection member 710may be, for example, a solder ball. The fifth conductive pattern 750 maybe provided on a top surface of the upper substrate 700. The fifthconductive pattern 750 may be electrically connected to the first uppersemiconductor chip 810 through a first wire 811 and may be electricallyconnected to the second upper semiconductor chip 830 through a secondwire 831. However, embodiments of inventive concepts are not limitedthereto. In certain embodiments, the fifth conductive pattern 750 may beelectrically connected to the first and second upper semiconductor chips810 and 830 by at least one of other various methods.

Unlike FIG. 12 , an additional interposer substrate may further beprovided between the first semiconductor package 10 and the secondsemiconductor package 20. In addition, unlike FIG. 12 , adhesive layersmay further be provided between the upper substrate 700 and the firstupper semiconductor chip 810 and between the first upper semiconductorchip 810 and the second upper semiconductor chip 830, respectively.

According to the embodiments of inventive concepts, the cross-sectionalarea of the via structure may be increased to improve the electricalcharacteristics of the semiconductor package.

In addition, according to the embodiments of inventive concepts, it ispossible to prevent a crack from occurring at the via structure bystress, and thus the reliability of the semiconductor package may beimproved.

Furthermore, in the method of manufacturing the via structure of thesemiconductor package according to the embodiments of inventiveconcepts, the seed layer may be formed by the sputtering process, andthus a fine pattern may be formed by an environmentally friendly method.

While inventive concepts have been described with reference to exampleembodiments, it will be apparent to those skilled in the art thatvarious changes and modifications may be made without departing from thespirits and scopes of inventive concepts. Therefore, it should beunderstood that the above embodiments are not limiting, butillustrative. Thus, the scopes of inventive concepts are to bedetermined by the broadest permissible interpretation of the followingclaims and their equivalents, and shall not be restricted or limited bythe foregoing description.

What is claimed is:
 1. A semiconductor package comprising: a lowerinsulating layer including an under-bump metal layer; a solder ball on abottom surface of the lower insulating layer and connected to theunder-bump metal layer; a first substrate on a top surface of the lowerinsulating layer, the first substrate including a redistribution layer;a second substrate including a semiconductor chip electrically connectedto the redistribution layer and an interconnection layer, the secondsubstrate having a through-hole exposing the redistribution layer in aregion surrounding the semiconductor chip; a first encapsulation layercovering the second substrate and having a first via hole, the firstencapsulation layer filing the through-hole; a second encapsulationlayer covering the first encapsulation layer and having a second viahole in the first via hole, a diameter of the second via hole being lessthan a diameter of the first via hole; a via structure filing the secondvia hole, a sidewall of the via structure having a first surface, asecond surface and a third surface, the first surface of the sidewall ofthe via structure being inclined with respect to a top surface of thesecond substrate, the second surface of the sidewall of the viastructure being inclined with respect to each of the first surface ofthe sidewall of the via structure, the third surface of the sidewall ofthe via structure and the top surface of the second substrate, thesecond surface extending from an end of the first surface to an end ofthe third surface; and an upper insulating layer covering a portion ofthe via structure and a top surface of the second encapsulation layer.2. The semiconductor package of claim 1, wherein the via structurecomprises a seed layer conformally covering a top surface of theinterconnection layer exposed by the second via hole, a sidewall of thesecond encapsulation layer exposed by the second via hole, and a portionof the top surface of the second encapsulation layer.
 3. Thesemiconductor package of claim 2, wherein the seed layer includes atleast one of copper (Cu), nickel (Ni), silver (Ag), gold (Au), aluminum(Al), tungsten (W), platinum (Pt), palladium (Pd), or any alloy thereof.4. The semiconductor package of claim 2, wherein the via structurefurther comprises a conductive via and a conductive pad on the seedlayer, a width of the conductive via increases as a distance from thetop surface of the second substrate, and the conductive pad is providedon the conductive via and the seed layer.
 5. The semiconductor packageof claim 1, wherein the first surface of the sidewall of the viastructure is spaced apart from the first encapsulation layer with thesecond encapsulation layer in between, and a distance between the firstsurface and the first encapsulation layer is substantially constant inthe first via hole.
 6. The semiconductor package of claim 1, wherein asurface roughness of a sidewall of the first encapsulation layer isgreater than a surface roughness of a sidewall of the secondencapsulation layer.
 7. The semiconductor package of claim 1, whereinthe first encapsulation layer includes an insulating resin and aplurality of fillers.
 8. The semiconductor package of claim 7, whereinthe insulating resin includes a polymer material, and the fillersinclude an inorganic material.
 9. The semiconductor package of claim 7,wherein the fillers are atypical and are randomly dispersed in theinsulating resin.
 10. The semiconductor package of claim 1, wherein thesecond encapsulation layer includes a photo-imageable dielectric resin.11. The semiconductor package of claim 1, wherein the second surface ofthe sidewall of the via structure has a curved profile.
 12. Asemiconductor package comprising: a lower insulating layer including anunder-bump metal layer; a solder ball on a bottom surface of the lowerinsulating layer and connected to the under-bump metal layer; a firstsubstrate on a top surface of the lower insulating layer, the firstsubstrate including a redistribution layer; a second substrate includinga semiconductor chip electrically connected to the redistribution layerand an interconnection layer, the second substrate having a through-holeexposing the redistribution layer in a region surrounding thesemiconductor chip; a first encapsulation layer covering the secondsubstrate and having a first via hole, the first encapsulation layerfilling the through-hole; a second encapsulation layer covering thefirst encapsulation layer and having a second via hole in the first viahole, a diameter of the second via hole being less than a diameter ofthe first via hole; a via structure filling the second via hole; and anupper insulating layer covering a portion of the via structure and a topsurface of the second encapsulation layer, wherein the secondencapsulation layer includes a first portion conformally extending alonga sidewall of the first encapsulation layer in the first via hole, asecond portion inclined with respect to the first portion of the secondencapsulation layer and a top surface of the first encapsulation layer,and a third portion extending over the top surface of the firstencapsulation layer, and the first portion of the second encapsulationlayer has a constant width such that the first portion has a same slopeas the sidewall of the first encapsulation layer.
 13. The semiconductorpackage of claim 12, wherein the via structure comprises a seed layerconformally covering a top surface of the interconnection layer exposedby the second via hole, a sidewall of the second encapsulation layerexposed by the second via hole, and a portion of the top surface of thesecond encapsulation layer.
 14. The semiconductor package of claim 13,wherein the via structure further comprises a conductive via and aconductive pad on the seed layer, a width of the conductive viaincreases as a distance from a top surface of the second substrate, andthe conductive pad is provided on the conductive via and the seed layer.15. The semiconductor package of claim 12, wherein the firstencapsulation layer includes an insulating resin and a plurality offillers.
 16. The semiconductor package of claim 15, wherein theinsulating resin includes an epoxy or a polyimide, and the fillersinclude silica.
 17. The semiconductor package of claim 15, wherein atleast one of the fillers includes a protrusion protruding from thesidewall of the first encapsulation layer.
 18. The semiconductor packageof claim 15, wherein the sidewall of the first encapsulation layer hasfirst concave portions, a sidewall of the second encapsulation layer hassecond concave portions, and an average depth of the first concaveportions is greater than an average depth of the second concaveportions.
 19. The semiconductor package of claim 12, wherein the secondencapsulation layer includes at least one of photosensitive polyimide(PSPI), polybenzoxazole (PBO), a phenolic polymer, or abenzocyclobutene-based polymer (BCB).
 20. The semiconductor package ofclaim 12, wherein the second portion of the second encapsulation layerhas a curved profile.